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Focus on investment and development layout of semiconductor wet process equipment industry

Fully realize the domestic substitution of semiconductor wet process equipment

ZSE AUTO BENCH(BC SERIES)

Application

Wafer level packaging in the PR Stripping, atmospheric pressure flux cleaning, metal etching and other applications

Wafer size

200~300mm
Support warping operation
Can be compatible with warping degree ±5MM

Application of Wet Cleaning Processes

PR Stripping Atmospheric flux cleaning, metal etching

Features&configurations

● WPH≥70
● 2 FOUP
● Heating control,concentration control,flow rate control,pressure control et al.
● Bath overheating protection，leakage detection, classified discharge
● SECS/GEM communication

PRODUCTS
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苏州智程半导体科技股份有限公司

SUZHOU ZHICHENG SEMICONDUCTOR TECHNOLOGY CO., LTD.

Tel:0512-57762325 0512-55239392

Add:889 Zhonghua Road, Kunshan City, Jiangsu Province

Email:zse@zc-semi.com

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设计开发：联合企邦

0512-57762325
0512-55239392

zse@zc-semi.com