Home
Product
- Application
- Product Type
News
- Dynamic
- Information
Supplier
- Order Terms and Conditions
- Supplier solicitation
Service
About
- Introduction
- History
- Culture
- Honor
Contact
- Contact
- Join Us
- Message

PRODUCTS CENTER

Home /Product

Focus on investment and development layout of semiconductor wet process equipment industry

Fully realize the domestic substitution of semiconductor wet process equipment

METAL LIFT-OFF EQUIPMENT （CC SERIES）

Applications

Lift off process for power devices, filters, MEMS, LED and other fields

Wafer size

150~300mm

Process Specification

PR & metal residue free

Features & configurations

Standard configuration: 3 chambers (soaking, stripping, cleaning)
Support multiple process cavities
Maximum speed: 3000 RPM, speed accuracy: ±1RPM
NMP heating temperature Room temperature ～90℃±2℃
The maximum pressure of high-pressure degumming 18MPa
The process liquid can be recycled and filtered for use
Equipped with ultrasonic degumming function
Equipped with CO2 automatic fire extinguishing system

苏州智程半导体科技股份有限公司

SUZHOU ZHICHENG SEMICONDUCTOR TECHNOLOGY CO., LTD.

Tel:0512-57762325 0512-55239392

Add:889 Zhonghua Road, Kunshan City, Jiangsu Province

Email:zse@zc-semi.com